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Normas DIN – AENOR
DIN 32566:2007-04

DIN 32566:2007-04

Specification for an X-Ray Lithography Mask Support Ring

Spécification d'anneau porteur pour une masque lithographique en rayonnement X

Spezifikation eines Maskentragrings für die Röntgentiefenlithographie

Fecha Anulación:
2017-12 /Withdrawn
Relación con otras normas DIN:

Reemplazada por: DIN 32566:2007-12

Resumen:
This standard specifies the outer dimensions for a support ring for X-ray lithography masks. Masks from different users are intended to be used in different irradiation equipments. This standard does not specify the inner dimensions of the support ring, the fixation of the mask membrane on the support ring and the geometry of the layout field. It is therefore intended not to constrain future developments.
Keywords:
Back-up rings, Definitions, Dimensions, Electronic equipment and components, Fine mechanics, Lithography, Mask carriers, Masks, Microsystem techniques, Properties, Semiconductor devices, Semiconductors, Specification, Specification (approval), Support rings, X-ray, X-rays
47,94
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