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Normas DIN – AENOR
DIN 50451-4:2005-05

DIN 50451-4:2005-05

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Essais des matériaux pour la technologie des semi-conducteurs - Détermination des traces des éléments dans les liquides - Partie 4: Détermination des 34 éléments dans l'eau de grande pureté par spectrométrie de masse avec plasma à couplage inductif

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)

Fecha Anulación:
2017-02 /Withdrawn
Relación con otras normas DIN:

Reemplazada por: DIN 50451-4:2007-02

Resumen:
The document specifies a test method for the determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS). The method is applicable to mass fractions of elements from 10 ng/kg to 1000 ng/kg.
Keywords:
Aluminium, Analysis, Antimony, Arsenic, Barium, Beryllium, Bismuth, Boron, Cadmium, Calcium, Chemical analysis and testing, Chromium, Cobalt, Copper, Determination, Determination of content, Gallium, Germanium, High-purity, ICP, Indium, Inductive, Iron, Lead, Liquids, Lithium, Magnesium, Manganese, Mass spectrometry, Materials, Materials testing, Metals, Molybdenum, Nickel, Nitric acid, Palladium, Plasma, Platinum, Potassium, Sampling methods, Semiconductor engineering, Semiconductor technology, Semiconductors, Silver, Sodium, Strontium, Superpurity water, Testing, Thallium, Tin, Titanium, Trace elements, Vanadium, Water, Zinc, Zirconium
47,01
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