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Normas DIN – AENOR
DIN SPEC 1994:2016-07

DIN SPEC 1994:2016-07

Testing of materials for semiconductor technology - Determination of anions in weak acids / Note: Date of issue 2016-06-17

Essai des matériaux pour la technologie des semi-conducteurs - Détermination d´anions dans acides faibles / Attention: Date de parution 2016-06-17

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Anionen in schwachen Säuren / Achtung: Erscheinungsdatum 2016-06-17

Fecha Anulación:
2017-02 /Withdrawn
Relación con otras normas DIN:

Reemplazada por: DIN SPEC 1994:2017-02

Resumen:
This document specifies a method for the determination of the anions chloride, sulfate, nitrate and phosphate in hydrofluoric acid, ammonium fluoride solution and mixtures thereof and in acetic acid in the range of 10 ng/g to 1000 ng/g.
Keywords:
Acetic acid, Acids, Anions, Chlorides, Determination, Hydrofluoric acid, Materials, Nitrates, Phosphates, Semiconductor materials, Semiconductor technology, Semiconductors, Sulphates, Technology, Testing
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