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Normas DIN – AENOR
DIN EN ISO 14644-14:2017-01

DIN EN ISO 14644-14:2017-01

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016

Salles propres et environnements maîtrisés apparentés - Partie 14: Évaluation de l'aptitude à l'emploi des équipements par la détermination de la concentration de particules en suspension dans l'air (ISO 14644-14:2016); Version allemande EN ISO 14644-14:2016

Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft (ISO 14644-14:2016); Deutsche Fassung EN ISO 14644-14:2016

Fecha:
2017-01 /Active
Equivalencias internacionales:

EN ISO 14644-14 (2016-10)

ISO 14644-14 (2016-09)

Relación con otras normas DIN:
Resumen:
This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
Keywords:
Air pollution, Air purity, Air quality, Airborne dust, Capability, Categories of purity, Classification, Classification systems, Clean rooms, Cleanliness, Clean-room technology, Concentration, Concentration of particles, Consistency, Definitions, Degree of purity, Determination of content, Documentation, Exterior areas, Fitness for purpose, Impurities, Instruments, Light scatter measurement, Measuring instruments, Methods, Number of particles, Particle analysis, Particle size, Particle size distribution, Particles, Particulate air pollutants, Processes, Pure air, Purity criterion, Purity test, Suitability, Testing
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