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Normas DIN – AENOR
DIN EN ISO 14644-15:2016-05

DIN EN ISO 14644-15:2016-05

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO/DIS 14644-15:2016); German and English version prEN ISO 14644-15:2016 / Note: Date of issue 2016-04-08

Salles propres et environnements maîtrisés apparentés - Partie 15: Évaluation de la compatibilité des équipements à l'emploi en salle propre en termes de propreté chimique de l'air et des surfaces (ISO/DIS 14644-15:2016); Version allemande et anglaise prEN ISO 14644-15:2016 / Attention: Date de parution 2016-04-08

Reinräume und zugehörige Reinraumbereiche - Teil 15: Bewertung der Reinraumtauglichkeit von Geräten und Materialien anhand der chemischen Luft- und Oberflächenkonzentration (ISO/DIS 14644-15:2016); Deutsche und Englische Fassung prEN ISO 14644-15:2016 / Achtung: Erscheinungsdatum 2016-04-08

Fecha Anulación:
2018-03 /Withdrawn
Equivalencias internacionales:

ISO/DIS 14644-15 (2016-04)

prEN ISO 14644-15 (2016-04)

Relación con otras normas DIN:

Reemplazada por: DIN EN ISO 14644-15:2018-03

This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8). Health and safety requirements are not covered by this document and may be covered by legal documents of the specific country. The following issues are excluded: - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment.
Air, Air pollution, Air purity, Air quality, Airborne dust, Areas, Capability, Categories of purity, Chemical, Chemical properties, Classification, Clean rooms, Cleanliness, Clean-room technology, Concentration, Consistency, Contamination, Definitions, Degree of purity, Determination of content, Documentation, Evaluations, Exterior areas, Fitness for purpose, Impurities, Instructions, Instruments, Light scatter measurement, Materials, Measuring instruments, Methods, Number of particles, Particle analysis, Particle size distribution, Particulate air pollutants, Pure air, Purity, Purity criterion, Purity test, Specification (approval), Suitability, Surfaces, Testing
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