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Normas DIN – AENOR
DIN 32567-5:2015-06

DIN 32567-5:2015-06

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

Équipements de production pour systèmes microtechniques - Détermination de l'influence des matériaux sur la métrologie dimensionnelle optique et tactile - Partie 5: Dérivation des valeurs de correction pour les appareils de mesure d'optique

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 5: Ableitung von Korrekturwerten für optische Messgeräte

Fecha:
2015-06 /Active
Relación con otras normas DIN:

Reemplaza a: DIN 32567-5:2014-11

Resumen:
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Keywords:
Coating thickness, Correction value, Deviations, Fine mechanics, Influence factors, Layer thickness measurement, Manufacturing, Manufacturing equipment, Materials, Measurement, Measurement conditions, Measuring instruments, Measuring techniques, Metrology, Microtechnique, Optical, Physical properties, Plant construction, Plant engineering, Production engineering, Production equipment, Profilometers, Qualitative, Semiconductor engineering, Surfaces, Tactile, Test pieces, Topography, Workpieces
64,67
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