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Normas DIN – AENOR
DIN 32567-1:2015-06

DIN 32567-1:2015-06

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences

Équipements de production pour systèmes microtechniques - Détermination de l'influence des matériaux sur la métrologie dimensionnelle optique et tactile - Partie 1: Estimation qualitative des l'influences spécifiques des materiaux et des procedures

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 1: Qualitative Abschätzung der material- und verfahrensspezifischen Einflüsse

Fecha:
2015-06 /Active
Relación con otras normas DIN:

Reemplaza a: DIN 32567-1:2014-11

Resumen:
This document specifies methods to measure the layer thickness and step height on the shape of inhomogeneous materials with a stylus, white light interference, phase-shifting interference and confocal microscopic measuring devices in order to determine systematic deviations of the measured layer thickness and step height due to material effects.
Keywords:
Coating thickness, Contact stylus instruments, Definitions, Deviations, Fine mechanics, Influence factors, Interference method, Interferometers, Layer thickness measurement, Manufacturing, Manufacturing equipment, Materials, Measurement, Measurement conditions, Measuring techniques, Metrology, Microtechnique, Optical, Physical properties, Plant construction, Plant engineering, Production engineering, Production equipment, Profilometers, Qualitative, Semiconductor engineering, Stylus instrument method, Surfaces, Tactile, Test pieces, Workpieces
64,67
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