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Normas DIN – AENOR
DIN 32567-4:2014-11

DIN 32567-4:2014-11

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures / Note: Date of issue 2014-10-31

Équipements de production pour systèmes microtechniques - Détermination de l'influence des matériaux sur la métrologie dimensionnelle optique et tactile - Partie 4: Spécimen pour les procédés optiques / Attention: Date de parution 2014-10-31

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 4: Prüfkörper für optische Verfahren / Achtung: Erscheinungsdatum 2014-10-31

Fecha Anulación:
2015-06 /Withdrawn
Relación con otras normas DIN:

Reemplazada por: DIN 32567-4:2015-06

Resumen:
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Keywords:
Coating thickness, Deviations, Fine mechanics, Influence factors, Layer thickness measurement, Manufacturing, Manufacturing equipment, Materials, Measurement, Measurement conditions, Measuring techniques, Metrology, Microtechnique, Optical, Physical properties, Plant construction, Plant engineering, Production engineering, Production equipment, Profilometers, Qualitative, Semiconductor engineering, Surfaces, Tactile, Test pieces, Topography, Workpieces
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