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Normas DIN – AENOR
DIN 32567-2:2012-07

DIN 32567-2:2012-07

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures / Note: Date of issue 2012-06-18

Équipements de production pour systèmes microtechniques - Détermination de l'influence des matériaux sur la métrologie dimensionnelle optique et tactile - Partie 2: Spécimen pour les procédés tactiles / Attention: Date de parution 2012-06-18

Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 2: Prüfkörper für taktile Verfahren / Achtung: Erscheinungsdatum 2012-06-18

Fecha Anulación:
2014-10 /Withdrawn
Relación con otras normas DIN:

Reemplazada por: DIN 32567-2:2014-10

Resumen:
This document describes specimens for topographic layer thickness measurements to study the systematic effects that occur when layer and substrate have different physical properties.
Keywords:
Coating thickness, Definitions, Deviations, Fine mechanics, Influence factors, Layer thickness measurement, Manufacturing, Manufacturing equipment, Materials, Measurement, Measuring techniques, Metrology, Microtechnique, Physical properties, Plant construction, Plant engineering, Production engineering, Production equipment, Semiconductor engineering, Surfaces, Tactile, Test pieces, Workpieces
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