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Normas DIN – AENOR
DIN EN ISO 14644-9:2008-08

DIN EN ISO 14644-9:2008-08

Cleanrooms and associated controlled environments - Part 9: Classification of surface particle cleanliness (ISO/DIS 14644-9:2008); German version prEN ISO 14644-9:2008 / Note: Date of issue 2008-10-20

Salles propres et environnements maîtrisés apparentés - Partie 9: Classification de la propreté particulaire des surfaces (ISO/DIS 14644-9:2008); Version allemande prEN ISO 14644-9:2008 / Attention: Date de parution 2008-10-20

Reinräume und zugehörige Reinraumbereiche - Teil 9: Klassifzierung der partikulären Oberflächenreinheit (ISO/DIS 14644-9:2008); Deutsche Fassung prEN ISO 14644-9:2008 / Achtung: Erscheinungsdatum 2008-10-20

Fecha Anulación:
2012-12 /Withdrawn
Equivalencias internacionales:

ISO/DIS 14644-9 (2008-07)

prEN ISO 14644-9 (2008-07)

Relación con otras normas DIN:

Reemplazada por: DIN EN ISO 14644-9:2012-12

This part of ISO 14644 describes the classification of the particle contamination levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes. This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm. The following issues are not considered in this standard: - requirements on the cleanliness and suitability of surfaces for specific processes; - procedures for the cleaning of surfaces; - material characteristics; - other characteristics of particles such as electrostatic charge, ionic charges, biological state and others. This part of ISO 14644 covers the classification system of surface particle contamination but does not reference the interactive bonding forces or generation processes that are usually time-dependent (such as deposition, sedimentation, aging) and process-dependent (such as transportation or handling). Measurement methods of the classification should be adapted for surface characteristics (such as porosity, roughness, electrostatic charge, surface energy.). The surface cleanliness depends upon material and design characteristics, stress loads (complexity of loads acting on a surface) and prevailing environmental conditions, along with other factors. Due to the complexity of statistical evaluations and available bibliography, the selection and use of statistical methods for classification and testing are not described in this part of ISO 14644.
Air pollution, Air purity, Categories of purity, Classification, Classification systems, Clean rooms, Cleaning, Clean-room technology, Contamination, Definitions, Design, Particles, Pollution of the air, Purity, Purity requirements, Safety, Specification (approval), Surface cleaning, Surfaces, Surveillance (approval), Testing, Verification
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