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Normas DIN – AENOR
DIN 32566:2007-12

DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Equipement production pour systèmes microtechniques - Spécification d'anneau porteur pour une masque lithographique en rayonnement X

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie

Fecha:
2017-12 /Active
Relación con otras normas DIN:

Reemplaza a: DIN 32566:2007-04

Resumen:
This standard specifies the outer dimensions for a support ring for X-ray lithography masks. Masks from different users are intended to be used in different irradiation equipments. This standard does not specify the inner dimensions of the support ring, the fixation of the mask membrane on the support ring and the geometry of the layout field. It is therefore intended not to constrain future developments.
Keywords:
Back-up rings, Definitions, Dimensions, Electronic equipment and components, Fine mechanics, Lithography, Mask carriers, Masks, Microsystem techniques, Properties, Semiconductor devices, Semiconductors, Specification, Specification (approval), Support rings, X-ray, X-rays
47,94
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