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Normas BSI – AENOR
19/30399949 DC

19/30399949 DC

BS ISO 16531. Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Fecha:
2019-10-29 /Definitive
Comité:
CII/60
Equivalencias internacionales:

ISO/DIS 16531

Resumen:

This International Standard specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy and X-ray photoelectron spectroscopy. These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size below ~1 mm in diameter. The methods do not include depth resolution optimization.

Keywords:
Surfaces, Surface chemistry, Optical measurement, Chemical composition, Glow discharges, Quantitative analysis, Spectroscopy, Chemical analysis and testing, Thickness, Mass
22,05
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