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Normas BSI – AENOR
15/30323630 DC

15/30323630 DC

BS EN 62047-28. Semiconductor devices. Micro-electromechanical devices. Part 28. Performance testing method of vibration–driven MEMS electret energy harvesting devices

Fecha:
2015-04-08 /Definitive
Comité:
EPL/47
Equivalencias internacionales:

IEC Document 47F/220/CD

Keywords:
Integrating circuits, Test equipment, Thin-film devices, Bend testing, Resonance, Semiconductor technology, Electronic equipment and components, Semiconductor devices, Test specimens, Fatigue testing, Integrated circuits, Vibration, Electromechanical devices
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