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Normas BSI – AENOR
BS ISO 14706:2014

BS ISO 14706:2014

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Fecha:
2014-07-31 /Under Review
Comité:
CII/60
Equivalencias internacionales:

ISO 14706:2014

Relación con otras normas BSI:

Reemplaza a: BS ISO 14706:2000

Keywords:
Fluorimetry, Chemical analysis and testing, Density, Epitaxial layers, Surfactants, Contamination, Surfaces, X-ray analysis, Reflection, X-ray fluorescence spectrometry, Surface properties, Silicon, Contaminants, Surface chemistry, Substrates (insulating), Atoms
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