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Normas BSI – AENOR
BS EN 62047-21:2014

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

Fecha:
2014-10-31 /Definitive
Comité:
EPL/47
Equivalencias internacionales:

EN 62047-21:2014

IEC 62047-21:2014

Resumen:
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
Keywords:
Vibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits
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