BS EN 62047-21:2014

2014-10-31 /Definitive

31.080.99 - Other semiconductor devices

EPL/47

EN 62047-21:2014

IEC 62047-21:2014

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

Vibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits