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Normas BSI – AENOR
BS EN 62047-12:2011

BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

Fecha:
2011-11-30 /Definitive
Comité:
EPL/47
Equivalencias internacionales:

EN 62047-12:2011

IEC 62047-12:2011

Keywords:
Semiconductor devices, Test equipment, Vibration, Bend testing, Fatigue testing, Integrated circuits, Electromechanical devices, Test specimens, Thin-film devices, Semiconductor technology, Resonance, Electronic equipment and components
237,06
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