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PD ISO/TR 19319:2013

PD ISO/TR 19319:2013

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Fecha:
2013-03-31 /Definitive
ICS:

71.040.40 - Chemical analysis

Comité:
CII/60
Equivalencias internacionales:

ISO/TR 19319:2013

Relación con otras normas BSI:

Reemplaza a: PD ISO/TR 19319:2003

Keywords:
Auger electron spectroscopy, Surface chemistry, Electron emission, Photoelectron spectroscopy, Chemical analysis and testing, Spectroscopy, Resolution, Area, Surfaces, Chemical composition, X-ray photoelectron spectroscopy
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