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BS EN 62374:2007

BS EN 62374:2007

Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films

Fecha:
2008-10-31 /Under Review
ICS:

31.080.01 - Semiconductor devices in general

31.080.99 - Other semiconductor devices

Comité:
EPL/47
Equivalencias internacionales:

EN 62374:2007

IEC 62374:2007

Resumen:
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
Keywords:
Mathematical calculations, Electrical measurement, Semiconductor devices, Testing conditions, Semiconductors, Films (states of matter), Dielectric breakdown, Life (durability)
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