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Normas BSI – AENOR
BS ISO 14706:2000

BS ISO 14706:2000

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Fecha Anulación:
2014-07-31 /Withdrawn
Comité:
CII/60
Equivalencias internacionales:

ISO 14706:2000

Relación con otras normas BSI:

Reemplazada por: BS ISO 14706:2014

Keywords:
Surface chemistry, Reflection, Epitaxial layers, Contamination, Substrates (insulating), X-ray analysis, Fluorimetry, Density, X-ray fluorescence spectrometry, Surface properties, Atoms, Silicon, Surfaces, Surfactants, Chemical analysis and testing, Contaminants
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