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Normas BSI – AENOR
BS ISO 14237:2000

BS ISO 14237:2000

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

Fecha Anulación:
2010-08-31 /Withdrawn
Comité:
CII/60
Equivalencias internacionales:

ISO 14237:2000

Relación con otras normas BSI:

Reemplazada por: BS ISO 14237:2010

Keywords:
Statistical methods of analysis, Surface chemistry, Silicon, Spectroscopy, Calibration, Specimen preparation, Semiconductor technology, Single, Ions, Crystals, Precision, Mathematical calculations, Concentration (chemical), Boron, Isotopes, Homogeneity, Secondary, Control samples, Mass spectrometry, Performance testing, Test equipment, Doping agents, Chemical analysis and testing, Surface properties, Determination of content
216,12
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