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Normas ASTM – AENOR
ASTM F1367-98

ASTM F1367-98

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Fecha:
2021-03-02 /Historical
Superseeded by:
Scope:

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Keywords:
Chromium; Chromium sputtering targets; Sputtering; Targets; chromium sputtering targets for thin film applications, test
45,36
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