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ASTM F1094-87(1999)

ASTM F1094-87(1999)

Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method

2017-08-16 /Historical
Superseeded by:

1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.

1.2 Three methods are described as follows:

Test Method A--Sample Tap-Direct Filtration6 to 8
Test Method B--Presterilized Plastic Bag Technique9 to 12
Test Method B2--Dip Strip Technique2/Presterilized Plastic Bag

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use .

contamination; microbiological contamination; microbiological testing; semiconductor processing; water; water distribution system
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