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ASTM E1634-02

ASTM E1634-02

Standard Guide for Performing Sputter Crater Depth Measurements

2017-08-16 /Historical
Superseeded by:

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Auger electron spectroscopy; secondary ion mass spectrometry; stylus profilometry; surface analysis ; x-ray photoelectron spectroscopy
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